Product Introduction
Conjoined coating equipment is a vacuum coating mass production solution launched by Powertech. Continuous coating can prevent the coating chamber from being exposed to the atmosphere, which ensures the stability of the coating process and also saves pumping time and doubles the production efficiency. Conjoined equipment through the simplified and optimized configuration of the vacuum unit, the energy consumption of the conjoined equipment for plating the same quantity of products is about 60% of the energy consumption of the single equipment, effectively saving energy, reducing costs for enterprises, and greatly shortening the equipment investment payback period.
Advantages and benefits
Flexible configuration to meet specific production needs;
adopt closed-loop controller to improve coating uniformity;
seamless docking operation improves productivity; optimized magnetic configuration, with excellent uniformity and utilization;
compatible with automatic loading and unloading industrial robots.
Technical indicators
Device Model | SP-1006AS-L | SP-1316AS-L | SP-1885AS-L | SP-1912ASI-L |
Vacuum Chamber Size (mm) | 1000×600 | 1300×1600 | 1800×850 | 1900×1200 |
Maxium vacuum | 6.0E-4Pa | |||
Air Extraction Time | Ambient Pressure to 5.0E-3Pa in less than 15 mins | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Mechanical pump,Roots pump,Molecular pump,Maintenance pump | |||
Heating System | Room temperature to 300 ℃ (PID controlled) | |||
Air lnjection System | Mass flow controller (1-8 set) | |||
Targets | Multi-Arc Target, Sputtering Target,lon Source, Radio Frequency Target | |||
Power Supply | MF Sputtering Power Supply, HiPIMS Power Supply, Arc Power Supply, Bias Power Supply,DC Sputtering Power Supply,Radio Frequency Power Supply | |||
Workpiece Rotation Method | Vertical Planetary Movement, Linear or Reciprocating Linear | |||
Operating Method | Manual+Semi-Automatic+Fully Automatic +PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirequirements |
application area